검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Paramagnetic Defect Generation and Microstructure Change in Porous Low-k SiOCH Films with Vacuum Baking Tanbara K, Kamigaki Y Journal of the Electrochemical Society, 157(4), G95, 2010 |
| No. | Article |
|---|---|
| 1 |
Paramagnetic Defect Generation and Microstructure Change in Porous Low-k SiOCH Films with Vacuum Baking Tanbara K, Kamigaki Y Journal of the Electrochemical Society, 157(4), G95, 2010 |