검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Vertical distribution of lattice strain in polycrystalline silicon films grown on silicon dioxide Tanikawa A Journal of the Electrochemical Society, 148(8), G406, 2001 |
| 2 |
Strain near SiO2-Si interface revealed by X-ray diffraction intensity enhancement Emoto T, Akimoto K, Ishikawa Y, Ichimiya A, Tanikawa A Thin Solid Films, 369(1-2), 281, 2000 |
| 3 |
(100) Oriented Poly-Si Film Grown by Ultrahigh-Vacuum Chemical-Vapor-Deposition Tanikawa A, Tatsumi T Journal of the Electrochemical Society, 141(10), 2848, 1994 |