검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Microstructure and mechanical properties of sputter deposited tantalum nitride thin films after high temperature loading Grosser M, Seidel H, Schmid U Thin Solid Films, 629, 69, 2017 |
| 2 |
Fabrication of ultrathin films of Ta2O5 by a sol-gel method Wolf MJ, Roitsch S, Mayer J, Nijmeijer A, Bouwmeester HJM Thin Solid Films, 527, 354, 2013 |
| 3 |
Microstructural, optical and spectroscopic studies of laser ablated nanostructured tantalum oxide thin films Krishnan RR, Gopchandran KG, MahadevanPillai VP, Ganesan V, Sathe V Applied Surface Science, 255(16), 7126, 2009 |
| 4 |
I-V characteristics of tantalum oxide film and the effect of defects on its electrical properties Wang C, Fang L, Zhang G, Zhuang DM, Wu MS Thin Solid Films, 458(1-2), 246, 2004 |
| 5 |
Ultraviolet light enhancement of Ta2O5 dry etch rates Lee KP, Cho H, Singh RK, Pearton SJ, Hobbs C, Tobin P Journal of Vacuum Science & Technology B, 18(1), 293, 2000 |