검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Properties of TaSiN thin films deposited by reactive radio frequency magnetron sputtering Mesic B, Schroeder H Thin Solid Films, 520(13), 4497, 2012 |
| 2 |
Electrical and structural properties of TaSiN electrode for phase change random access memory Jung KM, Jung MS, Kim YB, Choi DK Thin Solid Films, 517(14), 3837, 2009 |
| 3 |
Formation and characterization of magnetron sputtered Ta-Si-N-O thin films Yan H, Li L, Ho FY, Liang MH, Pan JS, Xu S, Chen Z Thin Solid Films, 517(17), 5207, 2009 |