검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Surface passivation of InGaP/GaAs HBT using silicon-nitride film deposited by ECR-CVD plasma Manera LT, Zoccal LB, Diniz JA, Tatsch PJ, Doi I Applied Surface Science, 254(19), 6063, 2008 |
| 2 |
Deposition of silicon nitride by low-pressure electron cyclotron resonance plasma enhanced chemical vapor deposition in N-2/Ar/SiH4 Moshkalyov SA, Diniz JA, Swart JW, Tatsch PJ, Machida M Journal of Vacuum Science & Technology B, 15(6), 2682, 1997 |