검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Wet-chemical etching of metals for advanced semiconductor technology nodes: Ru etching in acidic Ce4+ solutions Philipsen H, Mouwen N, Teck S, Monnens W, Le QT, Holsteyns F, Struyf H Electrochimica Acta, 306, 285, 2019 |
| No. | Article |
|---|---|
| 1 |
Wet-chemical etching of metals for advanced semiconductor technology nodes: Ru etching in acidic Ce4+ solutions Philipsen H, Mouwen N, Teck S, Monnens W, Le QT, Holsteyns F, Struyf H Electrochimica Acta, 306, 285, 2019 |