검색결과 : 5건
No. | Article |
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1 |
Deposition of amorphous hydrogenated carbon films on Si and PMMA by pulsed direct-current plasma CVD Sung TL, Chao YA, Liu CM, Teii K, Teii S, Hsu CY Thin Solid Films, 519(20), 6688, 2011 |
2 |
Effect of gas composition on metal surface cleaning using atmospheric pressure microwave plasma Ono S, Teii S, Suzuki Y, Suganuma T Thin Solid Films, 518(3), 981, 2009 |
3 |
Argon dilution effects on diamond deposition in electron cyclotron resonance plasma: a double probe study Teii K, Yoshioka H, Ono S, Teii S Thin Solid Films, 437(1-2), 63, 2003 |
4 |
Proceedings of the 12th Symposium on Plasma Science for Materials (SPSM-12) Tokyo, Japan, 16-17 June 1999 - Preface Teii S, Oda T, Yoshida Y, Terashima K Thin Solid Films, 386(2), VII, 2001 |
5 |
Simulation and experiment of low-pressure oxygen - Nitrogen mixture gas glow discharge plasma Ono S, Kato H, Teii S Combustion Science and Technology, 133(1-3), 151, 1998 |