검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Selective epitaxial growth of 3C-SiC on patterned Si using hexamethyldisilane by APCVD Teker K Journal of Crystal Growth, 257(3-4), 245, 2003 |
| 2 |
Epitaxial growth of 3C-SiC on Si(001) using hexamethyldisilane and comparison with growth on Si(111) Teker K, Jacob C, Chung J, Hong MH Thin Solid Films, 371(1-2), 53, 2000 |