검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
A Multilevel Approach to the Control of a Chemical-Mechanical Planarization Process Telfeyan R, Moyne J, Chaudhry N, Pugmire J, Shellman S, Boning D, Moyne W, Hurwitz A, Taylor J Journal of Vacuum Science & Technology A, 14(3), 1907, 1996 |
| 2 |
Adaptive Extensions to a Multibranch Run-to-Run Controller for Plasma-Etching Moyne JR, Chaudhry N, Telfeyan R Journal of Vacuum Science & Technology A, 13(3), 1787, 1995 |