검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effect of gas introduction position on substrate etching by means of Ar-dominated graphite-cathodic-arc plasma beam in mu T-FAD Tanoue H, Kamiya M, Oke S, Suda Y, Takikawa H, Hasegawa Y, Taki M, Tsuji N, Ishikawa T, Yasui H, Temmei S, Takahashi H Thin Solid Films, 518(13), 3546, 2010 |