검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Preferred orientation and film structure of TaN films deposited by reactive magnetron sputtering Noda S, Tepsanongsuk K, Tsuji Y, Kajikawa Y, Ogawa Y, Komiyama H Journal of Vacuum Science & Technology A, 22(2), 332, 2004 |
| No. | Article |
|---|---|
| 1 |
Preferred orientation and film structure of TaN films deposited by reactive magnetron sputtering Noda S, Tepsanongsuk K, Tsuji Y, Kajikawa Y, Ogawa Y, Komiyama H Journal of Vacuum Science & Technology A, 22(2), 332, 2004 |