검색결과 : 2건
No. | Article |
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1 |
Ultraviolet-ozone oxidation of metal films Ramanathan S, Chi D, McIntyre PC, Wetteland CJ, Tesmer JR Journal of the Electrochemical Society, 150(5), F110, 2003 |
2 |
The Microstructure and Properties of a Buried AlN Layer Produced by Nitrogen Implantation into Pure Aluminum Lu HL, Sommer WF, Borden MJ, Tesmer JR, Wu XD Thin Solid Films, 289(1-2), 17, 1996 |