검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of TiO2 from tetrakis(dimethylamino) titanium and H2O Abendroth B, Moebus T, Rentrop S, Strohmeyer R, Vinnichenko M, Weling T, Stocker H, Meyer DC Thin Solid Films, 545, 176, 2013 |
| 2 |
Low temperature chemical vapor deposition of titanium nitride films from tetrakis(ethylmethylamido)titanium and ammonia Panda S, Kim J, Weiller BH, Economou DJ, Hoffman DM Thin Solid Films, 357(2), 125, 1999 |