검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
300-KHz Pulse Plasma-Etching of GaAs Using a Mixture of Cich3 and H2 Law VJ, Tewordt M, Clary DC, Jones GA Journal of Vacuum Science & Technology B, 11(6), 2262, 1993 |
| No. | Article |
|---|---|
| 1 |
300-KHz Pulse Plasma-Etching of GaAs Using a Mixture of Cich3 and H2 Law VJ, Tewordt M, Clary DC, Jones GA Journal of Vacuum Science & Technology B, 11(6), 2262, 1993 |