화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Macroscopic and microstructural properties of CSixNy thin films deposited by RF nitrogen-plasma-assisted pulsed laser deposition
Tharigen T, Lorenz A
Applied Surface Science, 179(1-4), 156, 2001
2 Electron emission from arc-modified diamond-like carbon films at low electric field
Tharigen T, Hartmann E, Lenk M, Mende A, Otte K, Lorenz M, Hallmeier KH
Applied Surface Science, 182(1-2), 142, 2001
3 Hard amorphous CSixNy thin films deposited by RF nitrogen plasma assisted pulsed laser ablation of mixed graphite/Si3N4-targets
Tharigen T, Lippold G, Riede V, Lorenz M, Koivusaari KJ, Lorenz D, Mosch S, Grau P, Hesse R, Streubel P, Szargan R
Thin Solid Films, 348(1-2), 103, 1999