검색결과 : 12건
| No. | Article |
|---|---|
| 1 |
Low temperature Si:C co-flow and hybrid process using Si3H8/Cl-2 Bauer M, Thomas SG Thin Solid Films, 520(8), 3133, 2012 |
| 2 |
Low temperature catalyst enhanced etch process with high etch rate selectivity for amorphous silicon based alloys over single-crystalline silicon based alloys Bauer M, Thomas SG Thin Solid Films, 520(8), 3139, 2012 |
| 3 |
Low temperature selective epitaxial growth of SiCP on Si(110) oriented surfaces Bauer M, Thomas SG Thin Solid Films, 520(8), 3144, 2012 |
| 4 |
Characterization and analysis of epitaxial silicon phosphorus alloys for use in n-channel transistors Weeks KD, Thomas SG, Dholabhai P, Adams J Thin Solid Films, 520(8), 3158, 2012 |
| 5 |
Novel chemical precursors and novel CVD strategies enabling low temperature epitaxy of Si and Si:C alloys Bauer M, Thomas SG Thin Solid Films, 518, S200, 2010 |
| 6 |
Enabling Moore's Law beyond CMOS technologies through heteroepitaxy Thomas SG, Tomasini P, Bauer M, Vyne B, Zhang Y, Givens M, Devrajan J, Koester S, Lauer I Thin Solid Films, 518, S53, 2010 |
| 7 |
Analysis of silicon germanium vapor phase epitaxy kinetics Tomasini P, Machkaoutsan V, Thomas SG Thin Solid Films, 518, S12, 2010 |
| 8 |
Stability of silicon germanium stressors Tomasini P, Machkaoutsan V, Thomas SG, Loo R, Caymax M, Verheyen P Thin Solid Films, 518, S133, 2010 |
| 9 |
Hydrogen termination for extended queue times for low temperature epitaxy Brabant P, Ferrara J, Pagliaro B, Weeks K, Rittgers M, Scott R, Zhang Y, Landin T, Irving T, Spear J, Italiano J, Thomas SG Applied Surface Science, 255(5), 1741, 2008 |
| 10 |
The effect of plastic strain relaxation on the morphology of Ge quantum dot superlattices Liu JL, Wang KL, Xie QH, Thomas SG Journal of Crystal Growth, 274(3-4), 367, 2005 |