검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Stress evolution as a function of substrate bias in rf magnetron sputtered yttria-stabilized zirconia films Piascik JR, Thompson JY, Bower CA, Stoner BR Journal of Vacuum Science & Technology A, 24(4), 1091, 2006 |
| 2 |
Evaluation of crystallinity and film stress in yttria-stabilized zirconia thin films Piascik JR, Thompson JY, Bower CA, Stoner BR Journal of Vacuum Science & Technology A, 23(5), 1419, 2005 |
| 3 |
The effect of deposition parameters on the properties of yttria-stabilized zirconia thin films Ruddell DE, Stoner BR, Thompson JY Thin Solid Films, 445(1), 14, 2003 |
| 4 |
Effect of deposition interruption and substrate bias on the structure of sputter-deposited yttria-stabilized zirconia thin films Ruddell DE, Stoner BR, Thompson JY Journal of Vacuum Science & Technology A, 20(5), 1744, 2002 |