검색결과 : 12건
| No. | Article |
|---|---|
| 1 |
Electron-Beam Microcolumns for Lithography and Related Applications Chang TH, Thomson MG, Kratschmer E, Kim HS, Yu ML, Lee KY, Rishton SA, Hussey BW, Zolgharnain S Journal of Vacuum Science & Technology B, 14(6), 3774, 1996 |
| 2 |
Experimental Evaluation of a 20X20 mm Footprint Microcolumn Kratschmer E, Kim HS, Thomson MG, Lee KY, Rishton SA, Yu ML, Zolgharnain S, Hussey BW, Chang TH Journal of Vacuum Science & Technology B, 14(6), 3792, 1996 |
| 3 |
The Electrostatic Moving Objective Lens and Optimized Deflection Systems for Microcolumns Thomson MG Journal of Vacuum Science & Technology B, 14(6), 3802, 1996 |
| 4 |
Lens and Deflector Design for Microcolumns Thomson MG, Chang TH Journal of Vacuum Science & Technology B, 13(6), 2445, 1995 |
| 5 |
Compression of Field-Emission Angular-Distribution Using a Cathode Shield Thomson MG Journal of Vacuum Science & Technology B, 13(6), 2455, 1995 |
| 6 |
Miniature Schottky Electron Source Kim HS, Yu ML, Kratschmer E, Hussey BW, Thomson MG, Chang TH Journal of Vacuum Science & Technology B, 13(6), 2468, 1995 |
| 7 |
An Electron-Beam Microcolumn with Improved Resolution, Beam Current, and Stability Kratschmer E, Kim HS, Thomson MG, Lee KY, Rishton SA, Yu ML, Chang TH Journal of Vacuum Science & Technology B, 13(6), 2498, 1995 |
| 8 |
Evaluation of Zr/O/W Schottky Emitters for Microcolumn Applications Kim HS, Kratschmer E, Yu ML, Thomson MG, Chang TH Journal of Vacuum Science & Technology B, 12(6), 3413, 1994 |
| 9 |
Electron-Electron Scattering in Microcolumns Thomson MG Journal of Vacuum Science & Technology B, 12(6), 3498, 1994 |
| 10 |
Sub-40 nm Resolution 1 keV Scanning Tunneling Microscope Field-Emission Microcolumn Kratschmer E, Kim HS, Thomson MG, Lee KY, Rishton SA, Yu ML, Chang TH Journal of Vacuum Science & Technology B, 12(6), 3503, 1994 |