검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Diffusion barrier performance of novel Ti/TaN double layers for Cu metallization Zhou YM, He MZ, Xie Z Applied Surface Science, 315, 353, 2014 |
| No. | Article |
|---|---|
| 1 |
Diffusion barrier performance of novel Ti/TaN double layers for Cu metallization Zhou YM, He MZ, Xie Z Applied Surface Science, 315, 353, 2014 |