검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Investigation on diffusion barrier properties of reactive sputter deposited TiAlxNyOz thin films for Cu metallization Kim HC, Alford TL Thin Solid Films, 449(1-2), 6, 2004 |
| No. | Article |
|---|---|
| 1 |
Investigation on diffusion barrier properties of reactive sputter deposited TiAlxNyOz thin films for Cu metallization Kim HC, Alford TL Thin Solid Films, 449(1-2), 6, 2004 |