검색결과 : 1건
No. | Article |
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1 |
Cathodic arc plasma deposited TiAlSiN thin films using an Al-15 at.% Si cathode Kim SK, Van Le V Thin Solid Films, 518(24), 7483, 2010 |
No. | Article |
---|---|
1 |
Cathodic arc plasma deposited TiAlSiN thin films using an Al-15 at.% Si cathode Kim SK, Van Le V Thin Solid Films, 518(24), 7483, 2010 |