검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
In-situ annealing characterization of atomic-layer-deposited Al2O3 in N-2, H-2 and vacuum atmospheres Broas M, Lemettinen J, Sajavaara T, Tilli M, Vuorinen V, Suihkonen S, Paulasto-Krockel M Thin Solid Films, 682, 147, 2019 |
| 2 |
Synchrotron X-ray diffraction topography study of bonding-induced strain in silicon-on-insulator wafers Lankinen A, Tuomi TO, Kostamo P, Jussila H, Sintonen S, Lipsanen H, Tilli M, Makinen J, Danilewsky AN Thin Solid Films, 603, 435, 2016 |