검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Estimating the effective pressure on patterned wafers during STI CMP Sorooshian J, Borucki L, Timon R, Stein D, Boning D, Hetherington D, Philipossian A Electrochemical and Solid State Letters, 7(10), G204, 2004 |
| No. | Article |
|---|---|
| 1 |
Estimating the effective pressure on patterned wafers during STI CMP Sorooshian J, Borucki L, Timon R, Stein D, Boning D, Hetherington D, Philipossian A Electrochemical and Solid State Letters, 7(10), G204, 2004 |