화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Ultra-thin gate oxide reliability projections
Weir BE, Alam MA, Silverman PJ, Baumann F, Monroe D, Bude JD, Timp GL, Hamad A, Ma Y, Brown MM, Hwang D, Sorsch TW, Ghetti A, Wilk GD
Solid-State Electronics, 46(3), 321, 2002
2 Scanning capacitance microscopy imaging of silicon metal-oxide-semiconductor field effect transistors
Kleiman RN, O'Malley ML, Baumann FH, Garno JP, Timp GL
Journal of Vacuum Science & Technology B, 18(4), 2034, 2000
3 Progress toward a 30 nm silicon metal-oxide-semiconductor gate technology
Tennant DM, Timp GL, Ocola LE, Green M, Sorsch T, Kornblit A, Klemens F, Kleiman R, Kim Y, Timp W
Journal of Vacuum Science & Technology B, 17(6), 3158, 1999