검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Simulations of BCl3/Cl-2/Ar plasmas with comparisons to diagnostic data Meeks E, Ho P, Ting AL, Buss RJ Journal of Vacuum Science & Technology A, 16(4), 2227, 1998 |
| No. | Article |
|---|---|
| 1 |
Simulations of BCl3/Cl-2/Ar plasmas with comparisons to diagnostic data Meeks E, Ho P, Ting AL, Buss RJ Journal of Vacuum Science & Technology A, 16(4), 2227, 1998 |