검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma reactive ion etching of FePt magnetic thin films in a CH4/O-2/Ar plasma Lee TY, Kim EH, Lee IH, Chung CW Thin Solid Films, 525, 182, 2012 |
| No. | Article |
|---|---|
| 1 |
Inductively coupled plasma reactive ion etching of FePt magnetic thin films in a CH4/O-2/Ar plasma Lee TY, Kim EH, Lee IH, Chung CW Thin Solid Films, 525, 182, 2012 |