검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
"SensArray" voltage sensor analysis in an inductively coupled plasma Titus MJ, Hsu CC, Graves DB Journal of Vacuum Science & Technology A, 28(1), 139, 2010 |
| 2 |
Wafer heating mechanisms in a molecular gas, inductively coupled plasma: in situ, real time wafer surface measurements and three-dimensional thermal modeling Titus MJ, Graves DB Journal of Vacuum Science & Technology A, 26(5), 1154, 2008 |
| 3 |
Measurement and modeling of time- and spatial-resolved wafer surface temperature in inductively coupled plasmas Hsu CC, Titus MJ, Graves DB Journal of Vacuum Science & Technology A, 25(3), 607, 2007 |