검색결과 : 1건
No. | Article |
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1 |
Radio frequency plasma annealing of positive charge generated by Fowler-Nordheim electron injection in buried oxides in silicon Nazarov AN, Kilchytska VI, Barchuk IP, Tkachenko AS, Ashok S Journal of Vacuum Science & Technology B, 18(3), 1254, 2000 |