검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Simulation of Locally Enhanced 3-Dimensional Diffusion in Chemically Amplified Resists Zuniga M, Wallraff G, Tomacruz E, Smith B, Larson C, Hinsburg WD, Neureuther AR Journal of Vacuum Science & Technology B, 11(6), 2862, 1993 |