검색결과 : 10건
| No. | Article |
|---|---|
| 1 |
Image contrast slope and line edge roughness of chemically amplified resists for postoptical lithography Kozawa T, Tagawa S, Santillan JJ, Toriumi M, Itani T Journal of Vacuum Science & Technology B, 25(6), 2295, 2007 |
| 2 |
Dissolution characteristics and reaction kinetics of molecular resists for extreme-ultraviolet lithography Toriumi M, Santillan J, Itani T, Kozawa T, Tagawa S Journal of Vacuum Science & Technology B, 25(6), 2486, 2007 |
| 3 |
Fluoropolymers for 157 nm single-layer resists Toriumi M, Ishikawa T, Kodani T, Koh M, Moriya T, Yamashita T, Araki T, Aoyama H, Yamazaki T, Furukawa T, Itani T Journal of Vacuum Science & Technology B, 22(1), 27, 2004 |
| 4 |
Dissolution behavior of main-chain-fluorinated polymers for 157 nm lithography Kodani T, Ishikawa T, Yoshida T, Hayami T, Koh M, Moriya T, Yamashita T, Toriumi M, Araki T, Aoyama H, Hagiwara T, Furukawa T, Itani T, Fujii K Journal of Vacuum Science & Technology B, 22(6), 3509, 2004 |
| 5 |
Fluoropolymer-based resists for a single-resist process of 157 nm lithography Toriumi M, Yamazaki T, Furukawa T, Irie S, Ishikawa S, Itani T Journal of Vacuum Science & Technology B, 20(6), 2909, 2002 |
| 6 |
Characterization of fluoropolymers for 157 nm chemically amplified resist Itani T, Toriumi M, Naito T, Ishikawa S, Miyoshi S, Yamazaki T, Watanabe M Journal of Vacuum Science & Technology B, 19(6), 2705, 2001 |
| 7 |
Vacuum ultraviolet spectra of fluorocompounds for 157 nm lithography Toriumi M, Satou I, Itani T Journal of Vacuum Science & Technology B, 18(6), 3328, 2000 |
| 8 |
Grain-Growth Rates of Mgsio3 Perovskite and Periclase Under Lower Mantle Conditions Yamazaki D, Kato T, Ohtani E, Toriumi M Science, 274(5295), 2052, 1996 |
| 9 |
Harper-Dorn Creep in Polycrystalline Mgcl2-Center-Dot-6H(2)O, Catio3 and (Co0.5Mg0.5)O Wang JN, Shimamoto T, Toriumi M Journal of Materials Science Letters, 13(20), 1451, 1994 |
| 10 |
Newtonian Dislocation Creep in Quartzites - Implications for the Rheology of the Lower Crust Wang JN, Hobbs BE, Ord A, Shimamoto T, Toriumi M Science, 265(5176), 1204, 1994 |