검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Round-robin study of arsenic implant dose measurement in silicon by SIMS Simons D, Kim K, Benbalagh R, Bennett J, Chew A, Gehre D, Hasegawa T, Hitzman C, Ko J, Lindstrom R, MacDonald B, Magee C, Montgomery N, Peres P, Ronsheim P, Yoshikawa S, Schuhmacher M, Stockwell W, Sykes D, Tomita A, Toujou F, Won J Applied Surface Science, 252(19), 7232, 2006 |
| 2 |
Evaluation of BN-delta-doped multilayer reference materials for shallow depth profiling in SIMS: round-robin test Toujou F, Yoshikawa S, Homma Y, Takano A, Takenaka H, Tomita M, Li Z, Hasegawa T, Sasakawa K, Schuhmacher M, Merkulov A, Kim HK, Moon DW, Hong T, Won JY Applied Surface Science, 231-2, 649, 2004 |
| 3 |
Development of multiple As delta layer Si reference thin film for shallow junction secondary ion mass spectrometry profiling Moon DW, Lee HI, Kim HK, Kim KJ, Shon HK, Won JY, Lee JC, Toujou F Journal of Vacuum Science & Technology B, 22(1), 323, 2004 |
| 4 |
Steady-state surface concentration profiles of primary ion species during secondary ion mass spectrometry measurements Yoshikawa S, Morita H, Toujou F, Matsunaga T, Tsukamoto K Applied Surface Science, 203, 252, 2003 |
| 5 |
Application of SIMS in microelectronics Tsukamoto K, Yoshikawa S, Toujou F, Morita H Applied Surface Science, 203, 404, 2003 |
| 6 |
SIMS round-robin study of depth profiling of arsenic implants in silicon Tomita M, Hasegawa T, Hashimoto S, Hayashi S, Homma Y, Kakehashi S, Kazama Y, Koezuka K, Kuroki H, Kusama K, Li Z, Miwa S, Miyaki S, Okamoto Y, Okuno K, Saito S, Sasaki S, Shichi H, Shinohara H, Toujou F, Ueki Y, Yamamoto Y Applied Surface Science, 203, 465, 2003 |
| 7 |
Characterization of lubricants for fluid dynamic bearing by TOF-SIMS Toujou F, Tsukamoto K, Matsuoka K Applied Surface Science, 203, 590, 2003 |