검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Aqueous cleaning of sidewall redepositions formed by reactive ion etching of platinum Ranpura HM, Butler DH, Chang LH, Tracy CJ, Beaudoin SP Journal of the Electrochemical Society, 146(8), 3114, 1999 |
| 2 |
A Comparative-Study of Hillock Formation in Aluminum Films Martin BC, Tracy CJ, Mayer JW, Hendrickson LE Thin Solid Films, 271(1-2), 64, 1995 |
| 3 |
Compositional Variation in Sputtered Ti-W Films Due to Reemission Rogers BR, Tracy CJ, Cale TS Journal of Vacuum Science & Technology B, 12(5), 2980, 1994 |