검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Ultrathin membrane masks for electron projection lithography Wood OR, Trybula WJ, Greschner J, Kalt S, Bayer T, Shimizu S, Yamamoto H, Suzuki K, Gordon MS, Robinson CF, Dhaliwal RS, Thiel CW, Caldwell N, Lawliss MS, Huang C Journal of Vacuum Science & Technology B, 22(6), 3072, 2004 |
| 2 |
Assessment of image placement errors induced in electron projection lithography masks by chucking Chang J, Engelstad RL, Lovell EG, Trybula WJ, Wood OR Journal of Vacuum Science & Technology B, 22(6), 3077, 2004 |
| 3 |
Benchmarking stencil reticles for electron projection lithography Wood OR, Trybula WJ, Lercel MJ, Thiel CW, Lawliss MJ, Edinger K, Stanishevsky A, Shimizu S, Kawata S Journal of Vacuum Science & Technology B, 21(6), 3072, 2003 |