검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers Chen JQ, Louis E, Harmsen R, Tsarfati T, Wormeester H, van Kampen M, van Schaik W, van de Kruijs R, Bijkerk F Applied Surface Science, 258(1), 7, 2011 |
| 2 |
Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics Tsarfati T, van de Kruijs RWE, Zoethout E, Louis E, Bijkerk F Thin Solid Films, 518(24), 7249, 2010 |
| 3 |
Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography Tsarfati T, de Kruijs RWEV, Zoethout E, Louis E, Bijkerk F Thin Solid Films, 518(5), 1365, 2009 |