검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Highly Anisotropic Silicon Reactive Ion Etching for Nanofabrication Using Mixtures of SF6/Chf3 Gases Grigoropoulos S, Gogolides E, Tserepi AD, Nassiopoulos AG Journal of Vacuum Science & Technology B, 15(3), 640, 1997 |
| No. | Article |
|---|---|
| 1 |
Highly Anisotropic Silicon Reactive Ion Etching for Nanofabrication Using Mixtures of SF6/Chf3 Gases Grigoropoulos S, Gogolides E, Tserepi AD, Nassiopoulos AG Journal of Vacuum Science & Technology B, 15(3), 640, 1997 |