검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Oxidation-induced improvement in the sidewall morphology and cross-sectional profile of silicon wire waveguides Takahashi J, Tsuchizawa T, Watanabe T, Itabashi S Journal of Vacuum Science & Technology B, 22(5), 2522, 2004 |
| 2 |
Highly accurate x-ray masks with 100-nm-class high-density device patterns Uchiyama S, Shimada M, Tsuchizawa T, Ohkubo T, Oda M, Yoshihara H Journal of Vacuum Science & Technology B, 18(6), 2990, 2000 |
| 3 |
Progress in x-ray mask technology at NTT Oda M, Shimada M, Tsuchizawa T, Uchiyama S, Okada I, Yoshihara H Journal of Vacuum Science & Technology B, 17(6), 3402, 1999 |