검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Growth kinetics and doping mechanism in phosphorus-doped Si gas-source molecular beam epitaxy Tsukidate Y, Suemitsu M Applied Surface Science, 175, 43, 2001 |
| 2 |
Effects of surface phosphorus on the kinetics of hydrogen desorption from silane-adsorbed Si(100) surface at room temperatures Suemitsu M, Tsukidate Y, Nakazawa H, Enta Y Journal of Vacuum Science & Technology A, 16(3), 1772, 1998 |