검색결과 : 1건
No. | Article |
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1 |
New in situ measurement method for nanoparticles formed in a radio frequency plasma-enhanced chemical vapor deposition reactor Seol KS, Tsutatani Y, Fujimoto T, Okada Y, Takeuchi K, Nagamoto H Journal of Vacuum Science & Technology B, 19(5), 1998, 2001 |