검색결과 : 1건
No. | Article |
---|---|
1 |
Impact of in situ SiNx layer grown with metal organic vapor phase epitaxy on the electrical and optical properties of AlN/GaN metal insulator semiconductor field effect transistor structures Cho E, Seo S, Jin C, Pavlidis D, Fu G, Tuerck J, Jaegermann W Journal of Vacuum Science & Technology B, 27(5), 2079, 2009 |