검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Chip-scale modeling of electroplated copper surface profiles Park T, Tugbawa T, Boning D, Chidambaram C, Borst C, Shin G Journal of the Electrochemical Society, 151(6), C418, 2004 |
| 2 |
Modeling of reverse tone etchback shallow trench isolation chemical mechanical polishing Gan T, Tugbawa T, Lee B, Boning DS, Jang S Journal of the Electrochemical Society, 148(3), G159, 2001 |