검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of hafnium oxide using anhydrous hafnium nitrate Conley JF, Ono Y, Zhuang W, Tweet DJ, Gao W, Mohammed SK, Solanki R Electrochemical and Solid State Letters, 5(5), C57, 2002 |
| 2 |
Effect of interlayer on thermal stability of nickel silicide Maa JS, Ono Y, Tweet DJ, Zhang FY, Hsu ST Journal of Vacuum Science & Technology A, 19(4), 1595, 2001 |
| 3 |
Selectivity to silicon nitride in chemical vapor deposition of titanium silicide Maa JS, Howard DJ, He SS, Tweet DJ, Stecker L, Stecker G, Hsu ST Journal of Vacuum Science & Technology B, 17(5), 2243, 1999 |
| 4 |
Electrical properties of AlN thin films deposited at low temperature on Si(100) Aardahl CL, Rogers JW, Yun HK, Ono Y, Tweet DJ, Hsu ST Thin Solid Films, 346(1-2), 174, 1999 |