검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Rotational and translational temperature equilibrium in an inductively coupled plasma Shimada M, Tynan GR, Cattolica R Journal of Vacuum Science & Technology A, 24(5), 1878, 2006 |
| 2 |
Control of dissociation by varying oxygen pressure in noble gas admixtures for plasma processing Taylor KJ, Tynan GR Journal of Vacuum Science & Technology A, 23(4), 643, 2005 |
| 3 |
Electron beam fluorescence temperature measurements of N-2 in a semiconductor plasma reactor Shimada M, Cattolica R, Tynan GR Journal of Vacuum Science & Technology A, 22(2), 371, 2004 |
| 4 |
Control of plasma parameters by using noble gas admixtures Taylor KJ, Yun SM, Tynan GR Journal of Vacuum Science & Technology A, 22(5), 2131, 2004 |
| 5 |
Characterization of an Azimuthally Symmetrical Helicon Wave High-Density Plasma Source Tynan GR, Bailey AD, Campbell GA, Charatan R, Dechambrier A, Gibson G, Hemker DJ, Jones K, Kuthi A, Lee C, Shoji T, Wilcoxson M Journal of Vacuum Science & Technology A, 15(6), 2885, 1997 |