검색결과 : 2건
No. | Article |
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1 |
The microstructure and grain size of jet electroplated copper films in damascene trench features Tzanavaras A, Young G, Gleixner S Journal of the Electrochemical Society, 153(7), C509, 2006 |
2 |
The grain size and microstructure of jet-electroplated damascene copper films Tzanavaras A, Young G, Gleixner S Journal of the Electrochemical Society, 152(2), C101, 2005 |