검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Reactive ion etching of GaN/InGaN using BCl3 plasma Hong HF, Chao CK, Chyi JI, Tzeng YC Materials Chemistry and Physics, 77(2), 411, 2003 |
| No. | Article |
|---|---|
| 1 |
Reactive ion etching of GaN/InGaN using BCl3 plasma Hong HF, Chao CK, Chyi JI, Tzeng YC Materials Chemistry and Physics, 77(2), 411, 2003 |