검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Study on poly depletion in sub-0.1 mu m metal-oxide-semiconductor field effect transistors by scanning capacitance microscopy Wang YG, Edwards H, Ukraintsev V, Wu J, Chen J, Waller J, Woodall D, Scott DB, Machala C, Ekbote S, Tsao A Journal of Vacuum Science & Technology B, 22(1), 381, 2004 |
| 2 |
Nondestructive via in-hole profile characterization using atomic force microscopy metrology Ali A, Ukraintsev V, Sabri H, Yang M Journal of Vacuum Science & Technology B, 20(1), 95, 2002 |
| 3 |
Papers from the Sixth International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors - 22-26 April 2001 Napa Valley, California -Preface Ukraintsev V, Biesemans S, Majeed F, Miller D, Mulligan A Journal of Vacuum Science & Technology B, 20(1), 406, 2002 |