검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Film properties of nitrogen-doped polycrystalline silicon for advanced gate material Woo SH, Kim YW, Um PY, Lee HM, Kim CK Korean Journal of Chemical Engineering, 26(3), 824, 2009 |
| No. | Article |
|---|---|
| 1 |
Film properties of nitrogen-doped polycrystalline silicon for advanced gate material Woo SH, Kim YW, Um PY, Lee HM, Kim CK Korean Journal of Chemical Engineering, 26(3), 824, 2009 |