검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Demonstration of deep (80 mu m) RIE etching of SIC for MEMS and MMIC applications Sheridan DC, Casady JB, Ellis EC, Siergiej RR, Cressler JD, Strong RM, Urban WM, Valek WF, Seiler CF, Buhay H Materials Science Forum, 338-3, 1053, 2000 |