검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Thermal and Plasma Enhanced Atomic Layer Deposition of Al2O3 on GaAs Substrates Sioncke S, Delabie A, Brammertz G, Conard T, Franquet A, Caymax M, Urbanzcyk A, Heyns M, Meuris M, van Hemmen JL, Keuning W, Kessels WMM Journal of the Electrochemical Society, 156(4), H255, 2009 |