검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of an ultrashallow junction structure using angle resolved x-ray photoelectron spectroscopy and medium energy ion scattering Saheli G, Conti G, Uritsky Y, Foad MA, Brundle CR, Mack P, Kouzminov D, Werner M, van den Berg JA Journal of Vacuum Science & Technology B, 26(1), 298, 2008 |
| 2 |
Root Cause Determination of Particle Contamination in the Tungsten Etch Back Process Uritsky Y, Chen L, Zhang S, Wilson S, Mak A, Brundle CR Journal of Vacuum Science & Technology A, 15(3), 1319, 1997 |