검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Observation of anisotropic microstructural changes during cycling in LiNi0.5Co0.2Mn0.3O2 cathode material Kuriyama H, Saruwatari H, Satake H, Shima A, Uesugi F, Tanaka H, Ushirogouchi T Journal of Power Sources, 275, 99, 2015 |
| 2 |
Effect of Remaining Solvent on Sensitivity, Diffusion of Acid, and Resolution in Chemical Amplification Resists Asakawa K, Ushirogouchi T, Nakase M Journal of Vacuum Science & Technology B, 13(3), 833, 1995 |
| 3 |
Chemically Amplified Resist Using Self-Solubility Acceleration Effect Kihara N, Ushirogouchi T, Tada T, Naito T, Saito S, Nakase M Journal of the Electrochemical Society, 141(11), 3162, 1994 |
| 4 |
Key Technologies in Lower Submicron Lithography - Ultimate Super Resolution Imaging-System and Chemically Amplified Resist Using the Self-Solubility Acceleration Effect Nakase M, Inoue S, Fujisawa T, Kihara N, Ushirogouchi T Journal of Vacuum Science & Technology B, 11(6), 2680, 1993 |